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MegaSonic
systems
(arrays / tanks) : the TechSonic 1.8MHz module allows
you to efficiently clean your wafers down to a very small particle
size, or to enhance numerous process (lift-off, etc...).
Click here for more
information... |
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MegaSonic
FID : the FID measures instantaneously the MegaSonic
frequency and intensity in your tank. The ultimate tool for process
engineers.
Click here
for more information... |
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MegaSonic
LLS : this sensor gives you a very accurate
value of the liquid level in the tank (precision : 0.5mm)
in the range
from 0 to 400mm and can trigger multiple alarms.
Click here for more information... |
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