Megasonic systems cleaning results :
TechSonic's 1.8MHz vs. standard 1MHz (1/2)
The graphs presented on the next page summarize a test campaign performed at the LETI/CEA (Grenoble, France).
(view global results here)

Process conditions :
- standard and diluted SC1 solution
- liquid temperature : 50°C
- cleaning time : 10min
- recirculation by overflow (particle filter type CVV1 01 TPE)
- contamination : Si3N4 non-spherical particles, approx. 2000 particles/wafer
- particle detection : Tencor Surfscan 6200, threshold 0.16µm
- tray setup : standard 8in. standard PFA tray, fully loaded

The goal of these experiments was to quantify the difference in terms of Particle Removal Efficiency (PRE) for two megasonic systems working at different frequencies. Thus, two products have been compared : a standard 1MHz module, and Techsonic 1.8MHz module.

Many parameters have been investigated during these tests (type of particle to be removed, chemical dilution, liquid temperature, process time, gas concentration, etc...) to obtain a perfect comparison of both models. The graphs presented on the next page only show the SC1-dilution effect on removal of Si3N4 particles from different diameters. However, to review the whole results, please click here...